Invention Grant
- Patent Title: Method for producing semiconductor optical device
- Patent Title (中): 半导体光学元件的制造方法
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Application No.: US12782182Application Date: 2010-05-18
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Publication No.: US08409889B2Publication Date: 2013-04-02
- Inventor: Kenji Hiratsuka
- Applicant: Kenji Hiratsuka
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2009-124451 20090522
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a semiconductor optical device, includes the steps of: (a) forming a semiconductor region on a substrate, the substrate including first and second areas; the first area including device sections (b) forming a first mask on the semiconductor region, the first mask including first patterns periodically arranged in the first area and a second pattern provided in the second area; (c) forming a plurality of periodic structures in each of the device sections and a monitoring structure in the second area by using the first mask, the periodic structures respectively corresponding to the first patterns, the monitoring structure corresponding to the second pattern; (d) measuring a shape of the monitoring structure; (e) selecting a desired periodic structure from the plurality of periodic structures on a basis of a result of measuring the shape of the monitoring structure; (f) forming a second mask including a pattern on the desired periodic structure; and (g) forming stripe mesas including the desired periodic structure by using the second mask.
Public/Granted literature
- US20100297789A1 METHOD FOR PRODUCING SEMICONDUCTOR OPTICAL DEVICE Public/Granted day:2010-11-25
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