Invention Grant
- Patent Title: Dual-pore structure polishing pad
- Patent Title (中): 双孔结构抛光垫
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Application No.: US13422180Application Date: 2012-03-16
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Publication No.: US08408977B2Publication Date: 2013-04-02
- Inventor: David B. James , Henry Sanford-Crane
- Applicant: David B. James , Henry Sanford-Crane
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Inc.
- Current Assignee Address: US DE Newark
- Agent Blake T. Biederman
- Main IPC: B24D11/00
- IPC: B24D11/00

Abstract:
The polishing pad is useful for polishing at least one of magnetic, optical and semiconductor substrates. A porous polishing layer includes a dual porosity structure within a polyurethane matrix. The dual porosity structure has a primary set of pores having pore walls with a thickness of 15 to 55 μm and a storage modulus of 10 to 60 MPa measured at 25° C. In addition, pore walls contain a secondary set of pores having an average pore size of 5 to 30 μm. The porous polishing layer is either fixed to a polymeric film or sheet substrate or formed into a woven or non-woven structure to form the polishing pad.
Public/Granted literature
- US20120171940A1 Dual-Pore Structure Polishing Pad Public/Granted day:2012-07-05
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