Invention Grant
US08407883B2 Magnetically enhanced power inductor with self-aligned hard axis magnetic core produced in an applied magnetic field using a damascene process sequence 有权
使用大马士革过程序列在施加的磁场中产生的具有自对准硬轴磁芯的磁性增强型功率电感器

Magnetically enhanced power inductor with self-aligned hard axis magnetic core produced in an applied magnetic field using a damascene process sequence
Abstract:
A damascene process is utilized to fabricate the segmented magnetic core elements of an integrated circuit inductor structure. The magnetic core is electroplated from a seed layer that is conformal with a permanent dielectric mold that results in sidewall plating defining an easy magnetic axis. The hard axis runs parallel to the longitudinal axis of the core and the inductor coils are orthogonal to the core's longitudinal axis. The magnetic field generated by the inductor coils is, therefore, parallel and self-aligned to the hard magnetic axis. The easy axis is enhanced by electroplating in an applied magnetic field parallel to the easy axis.
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