Invention Grant
- Patent Title: Semiconductor devices and methods of fabricating the same
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US12832373Application Date: 2010-07-08
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Publication No.: US08405158B2Publication Date: 2013-03-26
- Inventor: Young-Bae Yoon , Jong-Hyuk Kim , Keonsoo Kim , Youngseop Rah , Yoonmoon Park
- Applicant: Young-Bae Yoon , Jong-Hyuk Kim , Keonsoo Kim , Youngseop Rah , Yoonmoon Park
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2009-0075278 20090814
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/76

Abstract:
A semiconductor memory device and method of manufacturing the same, the device including string structures, the string structures including two or more adjacent string selection transistors connected in series to each other in a first direction and being spaced apart from one another in a second direction intersecting the first direction, the two or more string selection transistors having different threshold voltages; string selection lines, the string selection lines connecting the adjacent string selection transistors of the string structures in the second direction; and a bit line electrically connecting two or more adjacent string structures, wherein a device isolation layer between the adjacent string selection transistors in the second direction has recessed regions, and profiles of the recessed regions on respective sides of the string selection transistors are different from each other.
Public/Granted literature
- US20110038211A1 SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2011-02-17
Information query
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