Invention Grant
- Patent Title: Bipolar integration without additional masking steps
- Patent Title (中): 双极整合,无需额外的屏蔽步骤
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Application No.: US12593316Application Date: 2008-03-26
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Publication No.: US08405157B2Publication Date: 2013-03-26
- Inventor: Thomas Uhlig , Felix Fuernhammer , Christoph Ellmers
- Applicant: Thomas Uhlig , Felix Fuernhammer , Christoph Ellmers
- Applicant Address: DE Erfurt
- Assignee: X-FAB Semiconductor Foundries AG
- Current Assignee: X-FAB Semiconductor Foundries AG
- Current Assignee Address: DE Erfurt
- Agency: Hunton & Williams LLP
- Priority: DE102007016090 20070326; DE102007034801 20070723
- International Application: PCT/EP2008/053555 WO 20080326
- International Announcement: WO2008/116875 WO 20081002
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
The invention relates to a BiMOS semiconductor component having a semiconductor substrate wherein, in a first active region, a depletion-type MOS transistor is formed comprising additional source and drain doping regions of the first conductivity type extending in the downward direction past the depletion region into the body doping region while, in a second active region, (101), a bipolar transistor (100) is formed, the base of which comprises a body doping region (112) and the collector of which comprises a deep pan (110), wherein an emitter doping region (114) of the first conductivity type and a base connection doping region (118) of the second conductivity type are formed in the body doping region. The semiconductor element can be produced with a particularly low process expenditure because it uses the same basic structure for the doping regions in the bipolar transistor as are used in the MOS transistor of the same semiconductor component.
Public/Granted literature
- US20100148276A1 BIPOLAR INTEGRATION WITHOUT ADDITIONAL MASKING STEPS Public/Granted day:2010-06-17
Information query
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