Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
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Application No.: US13153348Application Date: 2011-06-03
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Publication No.: US08405145B2Publication Date: 2013-03-26
- Inventor: Hitoshi Matsuura , Yoshito Nakazawa , Tsuyoshi Kachi , Yuji Yatsuda
- Applicant: Hitoshi Matsuura , Yoshito Nakazawa , Tsuyoshi Kachi , Yuji Yatsuda
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles and Stockbridge P.C.
- Priority: JP2006-216659 20060809
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/78
Abstract:
A gate trench 13 is formed in a semiconductor substrate 10. The gate trench 13 is provided with a gate electrode 16 formed over a gate insulating film 14. A portion of the gate electrode 16 protrudes from the semiconductor substrate 10, and a sidewall 24 is formed over a side wall portion of the protruding portion. A body trench 25 is formed in alignment with an adjacent gate electrode 16. A cobalt silicide film 28 is formed over a surface of the gate electrode 16 and over a surface of the body trench 25. A plug 34 is formed using an SAC technique.
Public/Granted literature
- US20110233665A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-09-29
Information query
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