Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
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Application No.: US13043714Application Date: 2011-03-09
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Publication No.: US08405142B2Publication Date: 2013-03-26
- Inventor: Ryota Katsumata , Kazuyuki Higashi , Yoshiaki Fukuzumi
- Applicant: Ryota Katsumata , Kazuyuki Higashi , Yoshiaki Fukuzumi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-212858 20100922
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate, a multilayer body, a semiconductor member and a charge storage layer. The multilayer body is provided on the substrate, with a plurality of insulating films and electrode films alternately stacked, and includes a first staircase and a second staircase opposed to each other. The semiconductor member is provided in the multilayer body outside a region provided with the first staircase and the second staircase, and the semiconductor member extends in stacking direction of the insulating films and the electrode films. The charge storage layer is provided between each of the electrode films and the semiconductor member. The each of the electrode films includes a first terrace formed in the first staircase, a second terrace formed in the second staircase and a bridge portion connecting the first terrace and the second terrace.
Public/Granted literature
- US20120068252A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2012-03-22
Information query
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