Invention Grant
- Patent Title: Showerhead electrode with centering feature
- Patent Title (中): 带中心功能的喷头电极
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Application No.: US12419878Application Date: 2009-04-07
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Publication No.: US08402918B2Publication Date: 2013-03-26
- Inventor: Babak Kadkhodayan , Anthony de la Llera
- Applicant: Babak Kadkhodayan , Anthony de la Llera
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/50 ; C23C16/505 ; C23C16/509 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22
Abstract:
A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
Public/Granted literature
- US20100252197A1 SHOWERHEAD ELECTRODE WITH CENTERING FEATURE Public/Granted day:2010-10-07
Information query
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