Invention Grant
US08401220B2 Piezoelectric micro speaker with curved lead wires and method of manufacturing the same 有权
具有弯曲引线的压电微型扬声器及其制造方法

Piezoelectric micro speaker with curved lead wires and method of manufacturing the same
Abstract:
A micro speaker includes a substrate having a cavity formed therein, a diaphragm formed on the substrate overlapping the cavity. The diaphragm includes a first vibration membrane formed in a first area corresponding to a center portion of the cavity and a second vibration membrane formed in a second area corresponding to an edge portion of the cavity and formed of material different from that used for the first vibration membrane. A piezoelectric actuator is formed including a first electrode layer formed on the first vibration membrane, a piezoelectric layer formed on the first electrode layer, and a second electrode layer formed on the piezoelectric layer, and first and second curved lead wires, respectively connected to the first and second electrode layers across the second area, which are symmetrical to the center of the piezoelectric actuator.
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