Invention Grant
- Patent Title: Observing device
- Patent Title (中): 观察装置
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Application No.: US12085197Application Date: 2006-11-29
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Publication No.: US08400710B2Publication Date: 2013-03-19
- Inventor: Susumu Terakawa , Takashi Sakurai , Hisao Osawa , Yasujiro Kiyota
- Applicant: Susumu Terakawa , Takashi Sakurai , Hisao Osawa , Yasujiro Kiyota
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-345418 20051130
- International Application: PCT/JP2006/323837 WO 20061129
- International Announcement: WO2007/063909 WO 20070607
- Main IPC: G02B21/06
- IPC: G02B21/06

Abstract:
The observing apparatus is being equipped with an image-forming optical system which forms an image of light emitted from a specimen, an imaging unit which picks up the image of the specimen formed by the image-forming optical system, and an illuminating unit which illuminates the specimen with a surface illuminant in which bright areas and dark areas are arranged alternately in order to provide an observing apparatus suitable to observe a transparent specimen with a wide field of view. If the position of the surface illuminant and the pitch of contrasting are set properly, each partial area of the specimen is illuminated obliquely at a small angle by each bright area of the surface illuminant. Therefore, the imaging unit can acquire a dark-field observation image of each partial area.
Public/Granted literature
- US20090273829A1 Observing Device Public/Granted day:2009-11-05
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