Invention Grant
- Patent Title: Method for arranging an optical module in a measuring apparatus and a measuring apparatus
- Patent Title (中): 在测量装置和测量装置中布置光学模块的方法
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Application No.: US12706560Application Date: 2010-02-16
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Publication No.: US08400618B2Publication Date: 2013-03-19
- Inventor: Martin Rath , Ulrich Mueller , Waldemar Mielke
- Applicant: Martin Rath , Ulrich Mueller , Waldemar Mielke
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102009009062 20090216
- Main IPC: G03B27/32
- IPC: G03B27/32

Abstract:
A method for arranging an optical module in a measuring apparatus includes: providing the measuring apparatus with an irradiation system for irradiating the optical module with electromagnetic radiation, a reference component, and a detection element defining a detection surface, the detection element being disposed in a defined position in relation to the reference component, disposing the optical module in the measuring apparatus such that the radiation emitted by the irradiation system passes through the optical module and impinges onto the detection surface as an exit beam, measuring a position of the exit beam in relation to the detection surface, adjusting the position of the optical module within the measuring apparatus such that the position of the exit beam in relation to the detection surface is brought to correspond to a predetermined position, and establishing position parameters defining the position of the optical module in relation to the reference component.
Public/Granted literature
- US20100208230A1 METHOD FOR ARRANGING AN OPTICAL MODULE IN A MEASURING APPARATUS AND A MEASURING APPARATUS Public/Granted day:2010-08-19
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