Invention Grant
- Patent Title: Optical element driving apparatus, projection optical system, exposure apparatus and device manufacturing method
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Application No.: US11919081Application Date: 2006-04-27
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Publication No.: US08400613B2Publication Date: 2013-03-19
- Inventor: Mitsuo Ishikawa
- Applicant: Mitsuo Ishikawa
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-134225 20050502
- International Application: PCT/JP2006/308899 WO 20060427
- International Announcement: WO2006/120927 WO 20061116
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G02B7/02
Abstract:
An outer ring (21) is arranged in a barrel unit (14c). A driving mechanism (25) provided on the outer ring shifts an optical element (M), and adjusts the position and the tilt of the optical element. A damper mechanism (31) for suppressing propagation of vibration to the optical element is attached to the outer ring.
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