Invention Grant
- Patent Title: Photoresist residue removal composition
- Patent Title (中): 光致抗蚀剂残留物去除组合物
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Application No.: US12607269Application Date: 2009-10-28
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Publication No.: US08399391B2Publication Date: 2013-03-19
- Inventor: Ho Sung Choi
- Applicant: Ho Sung Choi
- Agency: Ladas & Parry LLP
- Priority: KR10-2009-0001437 20090108
- Main IPC: C11D7/26
- IPC: C11D7/26 ; C11D7/32

Abstract:
A photoresist residue removal composition is provided. The photoresist residue removal composition essentially contains glycolic and water, to which a pH control agent and/or a cleanability improver is selectively added. The photoresist residue removal composition has a high capability to remove residues caused by plasma etching and ashing of a metal or silicon oxide layer under a photoresist pattern, does not cause corrosion, and is eco-friendly.
Public/Granted literature
- US20100173251A1 PHOTORESIST RESIDUE REMOVAL COMPOSITION Public/Granted day:2010-07-08
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