Invention Grant
US08399391B2 Photoresist residue removal composition 有权
光致抗蚀剂残留物去除组合物

  • Patent Title: Photoresist residue removal composition
  • Patent Title (中): 光致抗蚀剂残留物去除组合物
  • Application No.: US12607269
    Application Date: 2009-10-28
  • Publication No.: US08399391B2
    Publication Date: 2013-03-19
  • Inventor: Ho Sung Choi
  • Applicant: Ho Sung Choi
  • Agency: Ladas & Parry LLP
  • Priority: KR10-2009-0001437 20090108
  • Main IPC: C11D7/26
  • IPC: C11D7/26 C11D7/32
Photoresist residue removal composition
Abstract:
A photoresist residue removal composition is provided. The photoresist residue removal composition essentially contains glycolic and water, to which a pH control agent and/or a cleanability improver is selectively added. The photoresist residue removal composition has a high capability to remove residues caused by plasma etching and ashing of a metal or silicon oxide layer under a photoresist pattern, does not cause corrosion, and is eco-friendly.
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