Invention Grant
- Patent Title: Polishing method, polishing pad and polishing system
- Patent Title (中): 抛光方法,抛光垫和抛光系统
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Application No.: US12691184Application Date: 2010-01-21
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Publication No.: US08398461B2Publication Date: 2013-03-19
- Inventor: Yu-Piao Wang
- Applicant: Yu-Piao Wang
- Applicant Address: TW Taichung
- Assignee: IV Technologies Co., Ltd.
- Current Assignee: IV Technologies Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: TW98124439A 20090720
- Main IPC: B24B1/00
- IPC: B24B1/00

Abstract:
A polishing method, a polishing pad and a polishing system are provided. In the invention, the polishing pad is used to polish a polishing article. The polishing pad includes a polishing layer and a surface pattern disposed in the polishing layer. The polishing layer includes a polishing surface, a rotating central region, and a peripheral region. The surface pattern includes many grooves distributed from near the rotating central region and extending outward to near the peripheral region. The grooves include many groove cross sections along a circumferential direction of a same radius. Each of the groove cross sections has a left sidewall and a right sidewall. An included angle is formed by the polishing surface and one of a group of the left sidewalls and a group of the right sidewalls. The included angle is an obtuse angle.
Public/Granted literature
- US20110014853A1 POLISHING METHOD, POLISHING PAD AND POLISHING SYSTEM Public/Granted day:2011-01-20
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