Invention Grant
- Patent Title: Turbomolecular pump
- Patent Title (中): 涡轮分子泵
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Application No.: US11079649Application Date: 2005-03-14
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Publication No.: US08398362B2Publication Date: 2013-03-19
- Inventor: Armin Conrad , Peter Fahrenbach
- Applicant: Armin Conrad , Peter Fahrenbach
- Applicant Address: DE Asslar
- Assignee: Pfeiffer Vacuum GmbH
- Current Assignee: Pfeiffer Vacuum GmbH
- Current Assignee Address: DE Asslar
- Agency: Abelman, Frayne & Schwab
- Priority: DE102004012713 20040316
- Main IPC: F01D1/36
- IPC: F01D1/36

Abstract:
A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.
Public/Granted literature
- US20050207884A1 Turbomolecular pump Public/Granted day:2005-09-22
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