Invention Grant
- Patent Title: Piezoresistor height sensing cantilever
- Patent Title (中): 压敏电阻高度检测悬臂
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Application No.: US12465625Application Date: 2009-05-13
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Publication No.: US08393011B2Publication Date: 2013-03-05
- Inventor: Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
- Applicant: Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
- Applicant Address: US IL Skokie
- Assignee: NanoInk, Inc.
- Current Assignee: NanoInk, Inc.
- Current Assignee Address: US IL Skokie
- Agency: Foley & Lardner LLP
- Main IPC: G01Q70/14
- IPC: G01Q70/14
Abstract:
A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
Public/Granted literature
- US20100100989A1 PIEZORESISTOR HEIGHT SENSING CANTILEVER Public/Granted day:2010-04-22
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