Invention Grant
- Patent Title: Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body
- Patent Title (中): 半导体晶片处理带卷绕体,半导体晶片加工带贴附装置以及半导体晶片加工带卷绕体的半导体晶片处理装置
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Application No.: US11476382Application Date: 2006-06-28
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Publication No.: US08392011B2Publication Date: 2013-03-05
- Inventor: Takeshi Segawa , Koichi Yamaguchi , Yuichi Iwakata
- Applicant: Takeshi Segawa , Koichi Yamaguchi , Yuichi Iwakata
- Applicant Address: JP Tokyo
- Assignee: Lintec Corporation
- Current Assignee: Lintec Corporation
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2005-190388 20050629
- Main IPC: G06F19/00
- IPC: G06F19/00 ; H01L21/00 ; B29C65/00 ; B32B37/00

Abstract:
A semiconductor wafer processing tape sticking apparatus is provided and is capable of sticking a semiconductor wafer processing tape to a semiconductor wafer under the optimum conditions based on the processing data that has been written to a data carrier member and that has been read from the data carrier member without accessing the host computer unlike a conventional method. The semiconductor wafer processing tape sticking apparatus includes: a feeding apparatus provided with a feeding shaft to which a semiconductor wafer processing tape winding body can be detachably attached; a tape data read/write device for reading and writing the processing data that has been written to a data carrier member of the semiconductor wafer processing tape winding body; and a tape sticking apparatus for sticking a semiconductor wafer processing tape that has been fed out from the feeding apparatus to the semiconductor wafer based on the processing data that has been read by the tape data read/write device.
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