Invention Grant
- Patent Title: Micro movable element array and a communication apparatus
- Patent Title (中): 微动元件阵列和通信装置
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Application No.: US13225097Application Date: 2011-09-02
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Publication No.: US08390911B2Publication Date: 2013-03-05
- Inventor: Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
- Applicant: Osamu Tsuboi , Norinao Kouma , Tsuyoshi Matsumoto
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12

Abstract:
A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps.
Public/Granted literature
- US20120057214A1 MICRO MOVABLE ELEMENT ARRAY AND A COMMUNICATION APPARATUS Public/Granted day:2012-03-08
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