Invention Grant
US08390782B2 Multi nozzle proximity sensor employing common sensing and nozzle shaping
有权
多喷嘴接近传感器采用常规检测和喷嘴成型
- Patent Title: Multi nozzle proximity sensor employing common sensing and nozzle shaping
- Patent Title (中): 多喷嘴接近传感器采用常规检测和喷嘴成型
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Application No.: US12539190Application Date: 2009-08-11
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Publication No.: US08390782B2Publication Date: 2013-03-05
- Inventor: Joseph H. Lyons
- Applicant: Joseph H. Lyons
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01L7/00
- IPC: G01L7/00 ; G03B27/32 ; G03B27/42 ; G03B27/52

Abstract:
A fluid proximity sensor having one or more measurement nozzles and a reference nozzle coupled to a common chamber. Diaphragms coupled to the measurement nozzles can be sensed by optical, capacitive or inductive means so as to detect changes in pressure. In addition, the number of pressure detectors can be minimized through the use of control valves to selectively couple the nozzles to the detectors, while maintaining the required high level of topographic sensitivity. Further, the measurement nozzle dimensions can be adjusted to optimize proximity measurements in response to accuracy, speed and similar requirements.
Public/Granted literature
- US20100033705A1 Multi Nozzle Proximity Sensor Employing Common Sensing and Nozzle Shaping Public/Granted day:2010-02-11
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