Invention Grant
- Patent Title: Solid-state imaging device and manufacturing method thereof
- Patent Title (中): 固态成像装置及其制造方法
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Application No.: US12869799Application Date: 2010-08-27
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Publication No.: US08390707B2Publication Date: 2013-03-05
- Inventor: Hirofumi Yamashita
- Applicant: Hirofumi Yamashita
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-048412 20080228
- Main IPC: H04N3/14
- IPC: H04N3/14 ; H04N5/335

Abstract:
According to one embodiment, a solid-state imaging device includes a pixel region which is configured such that a photoelectric conversion unit and a signal scanning circuit unit are included in a semiconductor substrate, and a matrix of unit pixels is disposed, and a driving circuit region which is configured such that a device driving circuit for driving the signal scanning circuit unit is disposed on the semiconductor substrate, wherein the photoelectric conversion unit is provided on a back surface side of the semiconductor substrate, which is opposite to a front surface of the semiconductor substrate where the signal scanning circuit unit is formed, and the unit pixel includes an insulation film which is provided in a manner to surround a boundary part with the unit pixel that neighbors and defines a device isolation region.
Public/Granted literature
- US20110019050A1 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-01-27
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