A detection column wiring includes a set of a first metal wiring having a zigzag pattern and a second metal wiring having a structure axisymmetric with the first metal wiring about a column direction. The first metal wiring includes first sloped portions obliquely sloped by an inclination angle of 45° with respect to the column direction, and first parallel portions parallel with the column direction and continuous with the first sloped portions; the first sloped portions and the first parallel portions being repeatedly placed in a zigzag shape along the column direction. Each detection row wiring has the same structure. A sloped portion of the first sloped portions of the first metal wiring is always orthogonally and spatially intersected, at its middle point, with a sloped portion of the second sloped portions of the third metal wiring at its middle point. Other portions have the same orthogonal relationship.