Invention Grant
- Patent Title: Electromechanical actuator with interdigitated electrodes
- Patent Title (中): 具有交叉电极的机电致动器
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Application No.: US12879261Application Date: 2010-09-10
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Publication No.: US08390407B2Publication Date: 2013-03-05
- Inventor: Bernard Diem , Henri Sibuet
- Applicant: Bernard Diem , Henri Sibuet
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR0904345 20090911
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
A micromachined electromechanical (MEMS) actuator including, for example, an electrostatically actuated electrical switch, is provided, including a first set of conducting plates forming part of the movable element of the switch, interdigitated with a set of conducting plates forming part of the substrate. The plates are, in principle, vertical relative to the surface of the substrate; they are in partial heightwise overlap and a control voltage applied between the two sets of plates exerts a vertical force acting so as to move the movable element closer to the substrate. The conducting plates of the movable element are connected to one another by conducting end crosspieces connecting the ends of these plates so as to surround, laterally, the stationary conducting plates. The distance separating one stationary plate end from the mobile crosspiece is the same at both ends so that the forces exerted in the elongation direction of the plates cancel out. This distance is preferably the same for all the plates.
Public/Granted literature
- US20110220470A1 Electromechanical Actuator with Interdigitated Electrodes Public/Granted day:2011-09-15
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