Invention Grant
US08390398B2 Digitally programmable RF MEMS filters with mechanically coupled resonators 有权
具有机械耦合谐振器的数字可编程RF MEMS滤波器

Digitally programmable RF MEMS filters with mechanically coupled resonators
Abstract:
A digitally-tunable RF MEMS filter includes a substrate and a plurality of mechanically coupled resonators, wherein a first and a last resonator of the plurality of mechanically coupled resonators are configured to be electrostatically transduced. One or more of the plurality of mechanically coupled resonators are configured to be biased relative to the substrate such that the one or more biased resonators may be brought substantially in contact with the substrate. In a method of digitally tuning an RF MEMS filter having a mechanically coupled resonator array, a DC bias voltage is applied to at least a first resonator and a last resonator of the mechanically coupled resonator array such that motional boundary conditions for the at least first resonator and last resonator are selectable in proportion to the DC bias voltage.
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