Invention Grant
US08390179B2 Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
有权
压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法 压电发电元件
- Patent Title: Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
- Patent Title (中): 压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法 压电发电元件
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Application No.: US13551018Application Date: 2012-07-17
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Publication No.: US08390179B2Publication Date: 2013-03-05
- Inventor: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-136963 20100616
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (111) orientation, where 0.30≦x≦0.46 and 0.51≦y≦0.62.
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