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US08390178B2 Piezoelectric film and piezoelectric device 有权
压电薄膜和压电元件

Piezoelectric film and piezoelectric device
Abstract:
A piezoelectric film includes crystals of a complex oxide having a perovskite structure with (100)-preferred orientation and represented as: Pb1+δ[(ZrxTi1-x)1-yNby]Oz, where x is a value in a range of 0
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