Invention Grant
- Patent Title: Flip chip bump structure and fabrication method
- Patent Title (中): 倒装芯片凸块结构及制作方法
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Application No.: US13065298Application Date: 2011-03-18
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Publication No.: US08390116B1Publication Date: 2013-03-05
- Inventor: Ronald Patrick Huemoeller , Roger D. St. Amand , Robert Francis Darveaux
- Applicant: Ronald Patrick Huemoeller , Roger D. St. Amand , Robert Francis Darveaux
- Applicant Address: US AZ Chandler
- Assignee: Amkor Technology, Inc.
- Current Assignee: Amkor Technology, Inc.
- Current Assignee Address: US AZ Chandler
- Agency: McKay and Hodgson, LLP
- Agent Serge J. Hodgson
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A method includes forming a patterned buildup layer on a first surface of a dielectric layer, the patterned buildup layer including a patterned buildup layer opening exposing a trace coupled to the dielectric layer. A conductor layer is flash plated on the patterned buildup layer and within the patterned buildup layer opening. The patterned buildup layer opening is filled with a blanket conductive filler layer. The blanket conductive filler layer and the conductor layer are planarized to form a flip chip bump.
Information query
IPC分类: