Invention Grant
- Patent Title: Conductive oxide electrodes
- Patent Title (中): 导电氧化物电极
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Application No.: US12653854Application Date: 2009-12-18
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Publication No.: US08390100B2Publication Date: 2013-03-05
- Inventor: Jonathan Bornstein
- Applicant: Jonathan Bornstein
- Applicant Address: US CA Sunnyvale
- Assignee: Unity Semiconductor Corporation
- Current Assignee: Unity Semiconductor Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Stolowitz Ford Cowger LLP
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Conductive oxide electrodes are described, including a bi-layer barrier structure electrically coupled with an adhesion layer, and an electrode layer, wherein the bi-layer barrier structure includes a first barrier layer electrically coupled with the adhesion layer, and a second barrier layer electrically coupled with the first barrier layer and to the electrode layer. The conductive oxide electrodes and their associated layers can be fabricated BEOL above a substrate that includes active circuitry fabricated FEOL and electrically coupled with the conductive oxide electrodes through an interconnect structure that can also be fabricated FEOL. The conductive oxide electrodes can be used to electrically couple a plurality of non-volatile re-writeable memory cells with conductive array lines in a two-terminal cross-point memory array fabricated BEOL over the substrate and its active circuitry, the active circuitry configured to perform data operations on the memory array.
Public/Granted literature
- US20100155953A1 Conductive oxide electrodes Public/Granted day:2010-06-24
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