Invention Grant
US08390047B2 Miniaturized implantable sensor platform having multiple devices and sub-chips
有权
具有多个器件和子芯片的小型植入式传感器平台
- Patent Title: Miniaturized implantable sensor platform having multiple devices and sub-chips
- Patent Title (中): 具有多个器件和子芯片的小型植入式传感器平台
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Application No.: US12590883Application Date: 2009-11-16
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Publication No.: US08390047B2Publication Date: 2013-03-05
- Inventor: Faquir Chand Jain , Fotios Papadimitrakopoulos
- Applicant: Faquir Chand Jain , Fotios Papadimitrakopoulos
- Agent Steven M. McHugh
- Main IPC: A61B5/00
- IPC: A61B5/00

Abstract:
An implantable, miniaturized platform and a method for fabricating the platform is provided, where the e platform includes a top cover plate and a bottom substrate, top cover plate including an epitaxial, Si-encased substrate and is configured to include monolithically grown devices and device contact pads, the Si-encased substrate cover plate including a gold perimeter fence deposited on its Si covered outer rim and wherein the bottom substrate is constructed of Si and includes a plurality of partial-Si-vias (PSVs), electronic integrated circuits, device pads, pad interconnects and a gold perimeter fence, wherein the device pads are aligned with a respective device contact pad on the top cover plate and includes gold bumps having a predetermined height, the top cover plate and the bottom substrate being flip-chip bonded to provide a perimeter seal and to ensure electrical connectivity between the plurality of internal devices and at least one external component.
Public/Granted literature
- US20100148293A1 Miniaturized implantable sensor platform having multiple devices and sub-chips Public/Granted day:2010-06-17
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