Invention Grant
- Patent Title: Thin film transistor, display device, and electronic device
- Patent Title (中): 薄膜晶体管,显示器件和电子器件
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Application No.: US12951683Application Date: 2010-11-22
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Publication No.: US08389991B2Publication Date: 2013-03-05
- Inventor: Narihiro Morosawa , Eri Fukumoto , Yasuhiro Terai
- Applicant: Narihiro Morosawa , Eri Fukumoto , Yasuhiro Terai
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: SNR Denton US LLP
- Priority: JPP2009-273801 20091201
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L31/20 ; H01L31/036 ; H01L31/0376

Abstract:
The present invention provides a thin film transistor using an oxide semiconductor as a channel, controlling threshold voltage to a positive direction, and realizing improved reliability. The thin film transistor includes: a gate electrode; a pair of source/drain electrodes; an oxide semiconductor layer provided between the gate electrode and the pair of source/drain electrodes and forming a channel; a first insulating film as a gate insulating film provided on the gate electrode side of the oxide semiconductor layer; and a second insulating film provided on the pair of source/drain electrodes side of the oxide semiconductor layer. The first insulating film and/or the second insulating film contain/contains fluorine.
Public/Granted literature
- US20110140116A1 THIN FILM TRANSISTOR, DISPLAY DEVICE, AND ELECTRONIC DEVICE Public/Granted day:2011-06-16
Information query
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