Invention Grant
- Patent Title: Diode and storage layer semiconductor memory device
- Patent Title (中): 二极管和存储层半导体存储器件
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Application No.: US12879281Application Date: 2010-09-10
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Publication No.: US08389970B2Publication Date: 2013-03-05
- Inventor: Yutaka Ishibashi , Katsumasa Hayashi , Masahisa Sonoda
- Applicant: Yutaka Ishibashi , Katsumasa Hayashi , Masahisa Sonoda
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-218111 20090918
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L45/00

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate, an upper-layer wire provided on the substrate, a lower-layer wire provided on the substrate, a memory cell located at an intersection of the upper-layer wire and the lower-layer wire and includes a diode and a storage layer, a conductive layer located between the upper-layer wire and the memory cell in a direction perpendicular to the substrate surface, and an interlayer insulating film provided between memory cells. The position of an interface between the upper-layer wire and the interlayer insulating film is lower than a top surface of the conductive layer.
Public/Granted literature
- US20110068318A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-03-24
Information query
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