Invention Grant
- Patent Title: Ion implanting apparatus and deflecting electrode
- Patent Title (中): 离子注入装置和偏转电极
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Application No.: US13128893Application Date: 2009-08-31
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Publication No.: US08389964B2Publication Date: 2013-03-05
- Inventor: Tetsuya Igo , Tadashi Ikejiri , Takatoshi Yamashita
- Applicant: Tetsuya Igo , Tadashi Ikejiri , Takatoshi Yamashita
- Applicant Address: JP Kyoto
- Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2008-298794 20081121
- International Application: PCT/JP2009/065222 WO 20090831
- International Announcement: WO2010/058645 WO 20100527
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01L21/265

Abstract:
An ion implanting apparatus includes: an electrostatic accelerating tube for causing an ion beam extracted from an ion source to have a desirable energy, and deflecting the ion beam to be incident on a target, the electrostatic accelerating tube including deflecting electrodes provided to interpose the ion beam therebetween. The deflecting electrodes include a first deflecting electrode and a second deflecting electrode to which different electric potentials from each other are set. The second deflecting electrode is provided on a side where the ion beam is to be deflected and includes an upstream electrode provided on an upstream side of the ion beam and a downstream electrode provided apart from the upstream electrode toward a downstream side. An electric potential of the upstream electrode and an electric potential of the downstream electrode are independently set from each other.
Public/Granted literature
- US20110297843A1 ION IMPLANTING APPARATUS AND DEFLECTING ELECTRODE Public/Granted day:2011-12-08
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