Invention Grant
- Patent Title: Semiconductor device manufacturing method
- Patent Title (中): 半导体器件制造方法
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Application No.: US13422153Application Date: 2012-03-16
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Publication No.: US08389423B2Publication Date: 2013-03-05
- Inventor: Hiroshi Ohno
- Applicant: Hiroshi Ohno
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku, Tokyo
- Agency: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
One embodiment of the present invention provides a semiconductor device manufacturing method, including: performing a laser spike annealing, by irradiating light, whose wavelength is 10 μm to 11 μm, onto a semiconductor substrate including: an active area; a circuit pattern; and a dummy pattern formed at a position, whose distance from an end of the active area is equal to or more than 10 μm and equal to or less than 11 μm, at a pitch equal to or more than 10 nm and equal to or less than 510 nm, while setting an angle formed between an arrangement direction of the dummy pattern and a projection direction of the light to be equal to or more than 0° and equal to or less than 30°.
Public/Granted literature
- US20120178269A1 SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2012-07-12
Information query
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