Invention Grant
US08389392B2 FinFET with separate gates and method for fabricating a finFET with separate gates
有权
具有单独栅极的FinFET和用于制造具有分离栅极的finFET的方法
- Patent Title: FinFET with separate gates and method for fabricating a finFET with separate gates
- Patent Title (中): 具有单独栅极的FinFET和用于制造具有分离栅极的finFET的方法
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Application No.: US12866852Application Date: 2009-02-09
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Publication No.: US08389392B2Publication Date: 2013-03-05
- Inventor: Jan Sonsky , Radu Surdeanu
- Applicant: Jan Sonsky , Radu Surdeanu
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP08101457 20080211
- International Application: PCT/IB2009/050506 WO 20090209
- International Announcement: WO2009/101564 WO 20090820
- Main IPC: H01L21/3205
- IPC: H01L21/3205

Abstract:
The present invention relates to a FinFET with separate gates and to a method for fabricating the same. A dielectric gate-separation layer between first and second gate electrodes has an extension in a direction pointing from a first to a second gate layer that is smaller than a lateral extension of the fin between its opposite lateral faces. This structure corresponds with a processing method that starts from a covered basic FinFET structure with a continuous first gate layer, and proceeds to remove parts of the first gate layer and of a first gate-isolation layer through a contact opening to the gate layer. Subsequently, a replacement gate-isolation layer that at the same time forms the gate separation layer fabricated, followed by filling the tunnel with a replacement gate layer and a metal filling.
Public/Granted literature
- US20100314684A1 FINFET WITH SEPARATE GATES AND METHOD FOR FABRICATING A FINFET WITH SEPARATE GATES Public/Granted day:2010-12-16
Information query
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