Invention Grant
- Patent Title: Patterned semiconductor bases, and patterning methods
- Patent Title (中): 图案化半导体基底和图案化方法
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Application No.: US13080205Application Date: 2011-04-05
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Publication No.: US08389383B1Publication Date: 2013-03-05
- Inventor: John D. Hopkins
- Applicant: John D. Hopkins
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/544

Abstract:
Some embodiments include patterning methods. First and second masking features may be formed over first and second regions of a semiconductor base, respectively. A protective mask may be formed over the second masking features. First and second spacers may be formed along sidewall edges of the first masking features and along lateral edges of the protective mask, respectively. The protective mask and the first masking features may be removed without removing the second masking features, without removing the first spacers, and without removing the second spacers. The first spacers may be third masking features that are at a tighter pitch than the first masking features. Patterns of the second masking features and the third masking features may be transferred into the semiconductor base. Some embodiments include patterned semiconductor bases.
Information query
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