Invention Grant
- Patent Title: Heterojunction bipolar transistors with reduced base resistance
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Application No.: US12951516Application Date: 2010-11-22
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Publication No.: US08389372B2Publication Date: 2013-03-05
- Inventor: Erik M. Dahlstrom , Peter B. Gray , Qizhi Liu
- Applicant: Erik M. Dahlstrom , Peter B. Gray , Qizhi Liu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Agent Anthony J. Canale
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L21/8222

Abstract:
Heterojunction bipolar transistors with reduced base resistance, as well as fabrication methods for heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The heterojunction bipolar transistor includes a conductive layer between the intrinsic base and the extrinsic base. The conductive layer is comprised of a conductive material, such as a silicide, having a lower resistivity than the materials forming the intrinsic base and the extrinsic base.
Public/Granted literature
- US20120126292A1 HETEROJUNCTION BIPOLAR TRANSISTORS WITH REDUCED BASE RESISTANCE Public/Granted day:2012-05-24
Information query
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