Invention Grant
- Patent Title: Method of manufacturing a capacitive transducer
- Patent Title (中): 制造电容式换能器的方法
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Application No.: US13453957Application Date: 2012-04-23
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Publication No.: US08389349B2Publication Date: 2013-03-05
- Inventor: Tiansheng Zhou
- Applicant: Tiansheng Zhou
- Agency: Davis & Bujold, PLLC
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
A method of manufacturing a capacitive transducer by applying a first etching mask on a layer. Applying a second etching mask to define the movable set of fingers, the fixed set of fingers, a body, and springs, and the body is connected to the movable set of fingers and the springs while the movable set of fingers are interdigitated with the fixed set of fingers. Etching the layer and the first etching mask using the second etching mask and removing the second etching mask. Etching the layer such that one of the movable set of fingers and the fixed set of fingers is shorter than the other of the movable set of fingers and the fixed set of fingers. Releasing the body, the springs, and the movable set of fingers using etching, such that, upon applying a force to the body, the body moves parallel to the substrate.
Public/Granted literature
- US20120260500A1 Monolithic Capacitive Transducer Public/Granted day:2012-10-18
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