Invention Grant
US08389312B2 Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
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III族氮化物半导体激光器件及III族氮化物半导体激光器件的制造方法
- Patent Title: Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
- Patent Title (中): III族氮化物半导体激光器件及III族氮化物半导体激光器件的制造方法
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Application No.: US13367846Application Date: 2012-02-07
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Publication No.: US08389312B2Publication Date: 2013-03-05
- Inventor: Yusuke Yoshizumi , Shimpei Takagi , Takatoshi Ikegami , Masaki Ueno , Koji Katayama
- Applicant: Yusuke Yoshizumi , Shimpei Takagi , Takatoshi Ikegami , Masaki Ueno , Koji Katayama
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Santori; Tamatane J. Aga
- Priority: JPP2009-295574 20091225
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of fabricating a group-III nitride semiconductor laser device includes: preparing a substrate of a hexagonal group-III nitride semiconductor, where the substrate has a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, where the laser structure includes the substrate and a semiconductor region, and where the semiconductor region is formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal group-III nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.
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