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US08389309B2 Method for manufacturing semiconductor light-emitting apparatus 有权
半导体发光装置的制造方法

Method for manufacturing semiconductor light-emitting apparatus
Abstract:
There is provided a method for manufacturing a light-emitting element comprising a semiconductor layered structure of Group III-V compound semiconductor layers; the manufacturing method including a step of forming a projection/depression structure on a light extraction surface of the semiconductor layered structure using as an etchant an aqueous solution containing hydrobromic acid.
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