Invention Grant
US08389300B2 Controlling ferroelectricity in dielectric films by process induced uniaxial strain
有权
通过工艺诱导的单轴应变控制电介质薄膜的铁电性
- Patent Title: Controlling ferroelectricity in dielectric films by process induced uniaxial strain
- Patent Title (中): 通过工艺诱导的单轴应变控制电介质薄膜的铁电性
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Application No.: US12753270Application Date: 2010-04-02
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Publication No.: US08389300B2Publication Date: 2013-03-05
- Inventor: Catherine A. Dubourdieu , Martin M. Frank
- Applicant: Catherine A. Dubourdieu , Martin M. Frank
- Applicant Address: FR US NY Armonk
- Assignee: Centre National de la Recherche Scientifique,International Business Machines Corporation
- Current Assignee: Centre National de la Recherche Scientifique,International Business Machines Corporation
- Current Assignee Address: FR US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alezanian
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of controlling ferroelectric characteristics of integrated circuit device components includes forming a ferroelectrically controllable dielectric layer over a substrate; and forming a stress exerting structure proximate the ferroelectrically controllable dielectric layer such that a substantially uniaxial strain is induced in the ferroelectrically controllable dielectric layer by the stress exerting structure; wherein the ferroelectrically controllable dielectric layer comprises one or more of: a ferroelectric oxide layer and a normally non-ferroelectric material layer that does not exhibit ferroelectric properties in the absence of an applied stress.
Public/Granted literature
- US20110241091A1 CONTROLLING FERROELECTRICITY IN DIELECTRIC FILMS BY PROCESS INDUCED UNIAXIAL STRAIN Public/Granted day:2011-10-06
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