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US08389300B2 Controlling ferroelectricity in dielectric films by process induced uniaxial strain 有权
通过工艺诱导的单轴应变控制电介质薄膜的铁电性

Controlling ferroelectricity in dielectric films by process induced uniaxial strain
Abstract:
A method of controlling ferroelectric characteristics of integrated circuit device components includes forming a ferroelectrically controllable dielectric layer over a substrate; and forming a stress exerting structure proximate the ferroelectrically controllable dielectric layer such that a substantially uniaxial strain is induced in the ferroelectrically controllable dielectric layer by the stress exerting structure; wherein the ferroelectrically controllable dielectric layer comprises one or more of: a ferroelectric oxide layer and a normally non-ferroelectric material layer that does not exhibit ferroelectric properties in the absence of an applied stress.
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