Invention Grant
- Patent Title: Coating apparatus
- Patent Title (中): 涂装设备
-
Application No.: US12790853Application Date: 2010-05-31
-
Publication No.: US08388753B2Publication Date: 2013-03-05
- Inventor: Shao-Kai Pei
- Applicant: Shao-Kai Pei
- Applicant Address: TW New Taipei
- Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Altis Law Group, Inc.
- Priority: CN200910310691 20091130
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C16/00 ; C23F1/00

Abstract:
A coating apparatus includes a deposition case, a reaction assembly, two precursors, a target, and a driving assembly. The deposition case includes a housing defining a cavity for receiving workpieces. The reaction assembly receives in the cavity and includes an outer barrel, an inner barrel, a plurality of nozzles, and a plurality of pipes. The outer barrel includes a main body and two protruding bodies. The main body and the inner barrel cooperatively define a first room therebetween. Each protruding body defines a second room communicating with the first room. The inner barrel defines a third room. The nozzles extend from the main body and communicate with the first room. The pipes extend from the inner barrel and communicate with the third room. The precursors receive in the second rooms. The target receives in the third room. The driving assembly drives the housing to rotate relative to the reaction assembly.
Public/Granted literature
- US20110126766A1 COATING APPARATUS Public/Granted day:2011-06-02
Information query
IPC分类: