Invention Grant
- Patent Title: Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
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Application No.: US11820709Application Date: 2007-06-20
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Publication No.: US08387635B2Publication Date: 2013-03-05
- Inventor: Jimmy D. Collins , David DeKraker , Tracy A. Gast , Alan D. Rose
- Applicant: Jimmy D. Collins , David DeKraker , Tracy A. Gast , Alan D. Rose
- Applicant Address: US MN Chaska
- Assignee: Tel FSI, Inc.
- Current Assignee: Tel FSI, Inc.
- Current Assignee Address: US MN Chaska
- Agency: Kagan Binder, PLLC
- Main IPC: B08B3/02
- IPC: B08B3/02
Abstract:
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
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