Invention Grant
- Patent Title: Combinatorial process system
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Application No.: US13372729Application Date: 2012-02-14
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Publication No.: US08387563B2Publication Date: 2013-03-05
- Inventor: Rick Endo , Jeremy Cheng , Indranil De , James Tsung , Kurt Weiner , Maosheng Zhao
- Applicant: Rick Endo , Jeremy Cheng , Indranil De , James Tsung , Kurt Weiner , Maosheng Zhao
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/31
- IPC: H01L21/31 ; C23C16/458 ; C23C16/50 ; B65H1/00
Abstract:
A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
Public/Granted literature
- US20120142197A1 COMBINATORIAL PROCESS SYSTEM Public/Granted day:2012-06-07
Information query
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