Invention Grant
US08387465B2 Carbon nanotube vacuum gauges with wide-dynamic range and processes thereof
有权
碳纳米管真空计具有广泛的动态范围和工艺
- Patent Title: Carbon nanotube vacuum gauges with wide-dynamic range and processes thereof
- Patent Title (中): 碳纳米管真空计具有广泛的动态范围和工艺
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Application No.: US12323017Application Date: 2008-11-25
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Publication No.: US08387465B2Publication Date: 2013-03-05
- Inventor: Harish Manohara , Anupama B. Kaul
- Applicant: Harish Manohara , Anupama B. Kaul
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Sheppard, Mullin, Richter & Hampton LLP
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A miniature thermal conductivity gauge employs a carbon single-walled-nanotube. The gauge operates on the principle of thermal exchange between the voltage-biased nanotube and the surrounding gas at low levels of power and low temperatures to measure vacuum across a wide dynamic range. The gauge includes two terminals, a source of constant voltage to the terminals, a single-walled carbon nanotube between the terminals, a calibration of measured conductance of the nanotube to magnitudes of surrounding vacuum and a current meter in electrical communication with the source of constant voltage. Employment of the nanotube for measuring vacuum includes calibrating the electrical conductance of the nanotube to magnitudes of vacuum, exposing the nanotube to a vacuum, applying a constant voltage across the nanotube, measuring the electrical conductance of the nanotube in the vacuum with the constant voltage applied and converting the measured electrical conductance to the corresponding calibrated magnitude of vacuum using the calibration. The nanotube may be suspended to minimize heat dissipation through the substrate, increasing sensitivity at even tower pressures.
Public/Granted literature
- US20110174079A1 CARBON NANOTUBE VACUUM GAUGES WITH WIDE-DYNAMIC RANGE AND PROCESSES THEREOF Public/Granted day:2011-07-21
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