Invention Grant
- Patent Title: Scanning probe-based lithography method
- Patent Title (中): 扫描探针型光刻法
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Application No.: US12899817Application Date: 2010-10-07
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Publication No.: US08387160B2Publication Date: 2013-02-26
- Inventor: Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
- Applicant: Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Pete Tennant
- Main IPC: G01Q60/24
- IPC: G01Q60/24

Abstract:
A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.
Public/Granted literature
- US20110020533A1 SCANNING PROBE-BASED LITHOGRAPHY METHOD Public/Granted day:2011-01-27
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