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US08387158B2 Laser guided tip approach with 3D registration to a surface 有权
激光引导方法,3D对准表面

Laser guided tip approach with 3D registration to a surface
Abstract:
The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.
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