Invention Grant
- Patent Title: Semiconductor memory cell and manufacturing method thereof, and semiconductor memory devices
- Patent Title (中): 半导体存储单元及其制造方法以及半导体存储器件
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Application No.: US13211983Application Date: 2011-08-17
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Publication No.: US08385099B2Publication Date: 2013-02-26
- Inventor: Yukihiro Kaneko , Yoshihisa Kato , Hiroyuki Tanaka
- Applicant: Yukihiro Kaneko , Yoshihisa Kato , Hiroyuki Tanaka
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-040878 20090224; JP2009-054919 20090309; JP2009-119619 20090518
- Main IPC: G11C11/22
- IPC: G11C11/22

Abstract:
A semiconductor memory cell includes: a memory element formed by a first field effect transistor having a gate insulating film made of a ferroelectric film; and a select switching element formed by a second field effect transistor having a gate insulating film made of a paraelectric film. The ferroelectric film and the paraelectric film are stacked together with a semiconductor film of a compound semiconductor interposed therebetween. A first gate electrode of the first field effect transistor is formed on a side of the ferroelectric film, and a second gate electrode of the second field effect transistor is formed on a side of the paraelectric film so as to face the first gate electrode. The semiconductor film forms a common channel layer of the first and second field effect transistors.
Public/Granted literature
- US20110299318A1 SEMICONDUCTOR MEMORY CELL AND MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2011-12-08
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