Provided is an internal power supply voltage generation circuit with which a through current of a logic circuit supplied with an internal power supply voltage does not depend on a power supply voltage. A reference voltage (VREF) is generated based on a constant current of a current source (1) independently of a power supply voltage (VDD). Based on the reference voltage (VREF), an internal power supply voltage (DVDD) is generated independently of the power supply voltage (VDD) because of a source follower. A through current of a logic circuit (9) flows based on the internal power supply voltage (DVDD). The through current of the logic circuit (9) is therefore independent of the power supply voltage (VDD). The internal power supply voltage (DVDD) is a minimum power supply voltage for the logic circuit (9) to operate based on the specification. The through current of the logic circuit (9) is therefore small.