Invention Grant
- Patent Title: Method for manufacturing semiconductor device and semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
-
Application No.: US12476507Application Date: 2009-06-02
-
Publication No.: US08384166B2Publication Date: 2013-02-26
- Inventor: Kaori Takimoto
- Applicant: Kaori Takimoto
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: The Chicago Technology Law Group, LLC
- Agent Robert J. Depke
- Priority: JP2008-178837 20080709
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336 ; H01L21/28

Abstract:
A semiconductor device manufacturing method includes the steps of: successively forming, on a semiconductor substrate, a gate insulating film and first and second dummy sections stacked in this order; forming a notch section by processing the gate insulating film and the first and second dummy gate sections into a previously set pattern and making the first dummy gate section move back in the gate length direction relative to the second dummy gate section; forming a side wall of an insulating material in a side part of each of the gate insulating film and the first and second dummy gate sections and embedding the notch section therewith; removing the first and second dummy gate sections to leave the gate insulating film and the notch section in the bottom of a removed portion; and forming a gate electrode made of a conductive material by embedding the removed portion with the conductive material.
Public/Granted literature
- US20100006955A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2010-01-14
Information query
IPC分类: