Invention Grant
US08383564B2 Heterocoagulate, and compositions and method for polishing and surface treatment 有权
无纺物,以及用于抛光和表面处理的组合物和方法

Heterocoagulate, and compositions and method for polishing and surface treatment
Abstract:
A heterocoagulate comprises first particles, having a particle size of at most 999 nm, on a second particle, having a particle size of at least 3 microns. The first particles comprise cerium oxide, and second particle comprises at least one member selected from the group consisting of silicon oxides, aluminum oxides and zirconium oxides.
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