Invention Grant
- Patent Title: Methodology for wordline short reduction
- Patent Title (中): 字线缩短方法
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Application No.: US12947309Application Date: 2010-11-16
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Publication No.: US08383515B2Publication Date: 2013-02-26
- Inventor: Tuung Luoh , Ling-Wu Yang , Tahone Yang , Kuang-Chao Chen
- Applicant: Tuung Luoh , Ling-Wu Yang , Tahone Yang , Kuang-Chao Chen
- Applicant Address: TW Taipei
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Taipei
- Agency: Volpe and Koenig, P.C.
- Main IPC: H01L21/44
- IPC: H01L21/44
Abstract:
The method of forming a wordline is provided in the present invention. The proposed method includes steps of: (a) providing a plurality of SASTIs with a plurality of first POLY cells deposited thereon; and (b) depositing a first fill-in material having a relatively high etching rate oxide-like material in the plurality of SASTIs and on each side wall of the plurality of first POLY cells.
Public/Granted literature
- US20120122296A1 METHODOLOGY FOR WORDLINE SHORT REDUCTION Public/Granted day:2012-05-17
Information query
IPC分类:
